Considering characteristics of infrared optical coating such as complicated ingredients, thickness,
long working hours, and high control accuracy, the company has developed a special equipment
suitable for infrared anti-reflective coating, infrared spectroscopic coating, infrared filter coating and
other infrared optical film components.
-Ultimate vacuum: 8×10-5 Pa (12 hours)
-Vacuum recovery time: from atmospheric pressure to 4×10-3 Pa≤8min
-Adopting 400 molecular pump + direct-coupled pump + Roots pump
-The vacuum program has two modes: automatic and manual. PLC interlock control, status on computer display and control via compute
-Workpiece rotation: frequency converter speed control, 0-30 rpm
-Steam-resistant control: constant current control through high-power six-position rotary
-Workpiece baking: three-point temperature control, equipped with digital temperature controller+digital power regulator.
-One E-type electron gun, gun power 10KW; high voltage: 0-10KV adjustable; beam current: 0-1A adjustable; crucible with automatic memory of scanned patterns
-XTC/3 type crystal controller + 12-bit crystal control probe from INFICON of the United States, with process control
-Φ160MM ion source (Beijing), beam energy can be set by computer
-Control system: 15-inch touch screen or industrial computer as the host computer and PLC as the slave computer to realize automatic vacuuming, constant temperature baking, automatic
pre-melting control of the evaporation-resistant electron gun, coating control and film thickness monitoring, automatic control of the ion source, and baking cooling, automatic pick-up, all
parameter recording, which ensures fully automatic coating control via a single click
-When the pick-up mode is turned on, an automatic exhaust device of the vacuum chamber door will be activated to remove the smell in the clean room,which can effectively protect the safety of the operators
